Publication in BibTeX Format

@INPROCEEDINGS{AICPub1755:1990,
  AUTHOR={Murdock, J.L. and Hayes-Roth, B.},
  TITLE={Intelligent monitoring and diagnosis of semiconductor manufacturing},
  BOOKTITLE={Proceedings of the Fifth Annual SRC/DARPA CIM-IC Workshop},
  MONTH={August},
  YEAR={1990}
}