Search |  Contact |  SRI Home Do not follow this link, or your host will be blocked from this site. This is a spider trap. Do not follow this link, or your host will be blocked from this site. This is a spider trap. Do not follow this link, or your host will be blocked from this site. This is a spider trap.A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A ASRI International.  333 Ravenswood Avenue.  Menlo Park, CA 94025-3493. SRI International is a nonprofit corporation.

Publication Details

Intelligent monitoring and control of semiconductor manufacturing equipment

by Murdock, J.L. and Hayes-Roth, B.

IEEE Expert, vol. 6, no. 6, pp. 19-31, December 1991.

Abstract

The use of AI methods to monitor and control semiconductor fabrication in a state-of-the-art manufacturing environment called the Rapid Thermal Multiprocessor is described. Semiconductor fabrication involves many complex processing steps with limited opportunities to measure process and product properties. By applying additional process and product knowledge to that limited data, AI methods augment classical control methods by detecting abnormalities and trends, predicting failures, diagnosing, planning corrective action sequences, explaining diagnoses or predictions, and reacting to anomalous conditions that classical control systems typically would not correct. Research methodology and issues are discussed, and two diagnosis scenarios are examined.

Electronic Copies

DOI
10.1109/64.108948

BibTeX

EndNote
Copyright ©1991 IEEE

AIC Personnel

Name Title E-mail
Murdock, Janet Computer Scientist

SRI International
©2014 SRI International 333 Ravenswood Avenue, Menlo Park, CA 94025-3493
SRI International is an independent, nonprofit corporation. Privacy policy